Micro-layered-photolithography for Micro-Fabrication and Micro-Molding
Name
IMST014.pdf
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217.79 KB
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Checksum (MD5)
f48d5ff4fa0deea66c8ae76d5f5123f1
Author(s)
Tang, Y.
Loh, Han Tong
Fuh, J.-Y.-H.
Lu, L.
Wong, Yeow Sheong
Thian, S. C. H.
Date Issued
January 2005
Series/Report no.
Innovation in Manufacturing Systems and Technology (IMST);
Abstract
A novel process based on the principle of layered photolithography has been proposed and tested for making real three-dimensional micro-structures. An experimental setup was designed and built for doing experiments on this micro-fabrication process. An ultraviolet (UV) excimer laser at the wavelength of 248 nm was used as the light source and a single piece of photo-mask carrying a series of two dimensional (2D) patterns sliced from a three dimensional (3D) micro-part was employed for the photolithography process. The experiments were conducted on the solidification of liquid photopolymer from single layer to multiple layers. The single-layer photolithography experiments showed that certain photopolymers could be applied for the 3D micro-fabrication, and solid layers with sharp shapes could be formed from the liquid polymer identified. By using a unique alignment technique, multiple layers of photolithography was successfully realized for a micro-gear with features at 60 microns. Electroforming was also conducted for converting the photopolymer master to a metal cavity of the micro-gear, which proved that the process is feasible for micro-molding.
Subjects
Electroforming
Micro-fabrication
Micro-molding
Photolithography
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