Electrostatically actuated microelectromechanical test structures for material property measurement
Name
34097554-MIT.pdf
Description
Full printable version
Size
9.6 MB
Format
Adobe PDF
Checksum (MD5)
a28042d7c26b8a41ea45642a15f32afc
Author(s)
Osterberg, Peter Maynard
Advisor(s)
Stephen D. Senturia.
Date Issued
1995
Publisher
Massachusetts Institute of Technology
Description
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1995.
Includes bibliographical references (leaves 140-143).
Subjects
Electrical Engineering and Computer Science
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Terms of Use
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