Growth of erbium-doped Si/SiGe double heterostructures by ultra-high vacuum chemical vapor deposition
Name
37525748-MIT.pdf
Description
Full printable version
Size
8.39 MB
Format
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Checksum (MD5)
36e15bef105a412137625e5f5a291459
Author(s)
Morse, Michael Ty
Advisor(s)
Lionel C. Kimerling.
Date Issued
1997
Publisher
Massachusetts Institute of Technology
Description
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1997.
Includes bibliographical references (leaves 111-116).
Subjects
Materials Science and Engineering
MIT Department
Massachusetts Institute of Technology. Department of Materials Science and Engineering
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