Microstructural evolution of epitaxial dielectric films derived from chemical precursors
Name
33669110-MIT.pdf
Description
Full printable version
Size
8.3 MB
Format
Adobe PDF
Checksum (MD5)
90346cb510390f6f13d160ede38785f4
Author(s)
Ng, Man Fai
Advisor(s)
Michael J. Cima.
Date Issued
1995
Publisher
Massachusetts Institute of Technology
Description
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1995.
Includes bibliographical references (leaves 138-150).
Subjects
Materials Science and Engineering
MIT Department
Massachusetts Institute of Technology. Department of Materials Science and Engineering
Terms of Use
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