Top-down fabrication of high-uniformity nanodiamonds by self-assembled block copolymer masks
Name
s41598-019-43304-5.pdf
Description
Published version
Size
2.45 MB
Format
Adobe PDF
Checksum (MD5)
62d52c9bae4edafa1b91117a503a4765
Author(s)
Zheng, Jiabao
Lienhard, Benjamin
Bersin, Eric Alexander
Englund, Dirk R.
Date Issued
May 6, 2019
Journal
Scientific reports
Publisher
Springer Science and Business Media LLC
Citation
Zheng, Jiabao et al. "Top-down fabrication of high-uniformity nanodiamonds by self-assembled block copolymer masks." Scientific reports 9(2019): 6914 © 2019 The Author(s)
Version
Final published version
Abstract
Nanodiamonds hosting colour centres are a promising material platform for various quantum technologies. The fabrication of non-aggregated and uniformly-sized nanodiamonds with systematic integration of single quantum emitters has so far been lacking. Here, we present a top-down fabrication method to produce 30.0 ± 5.4 nm uniformly-sized single-crystal nanodiamonds by block copolymer self-assembled nanomask patterning together with directional and isotropic reactive ion etching. We show detected emission from bright single nitrogen vacancy centres hosted in the fabricated nanodiamonds. The lithographically precise patterning of large areas of diamond by self-assembled masks and their release into uniformly sized nanodiamonds open up new possibilities for quantum information processing and sensing.
Subjects
Multidisciplinary
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Terms of Use
Creative Commons Attribution 4.0 International license
Persistent DSpace Link
DOI of Published Version
https://doi.org/10.1038/s41598-019-43304-5
