Monolithic on-chip mid-IR methane gas sensor with waveguide-integrated detector
Name
Monolithic on-chip mid-IR methane gas sensor with waveguide-integrated detector.pdf
Description
Published version
Size
1.26 MB
Format
Adobe PDF
Checksum (MD5)
0f0dc1222c46d4db2467157e5cdf99ed
Author(s)
Su, P
Han, Z
Kita, D
Becla, P
Lin, H
Deckoff-Jones, S
Richardson, K
Kimerling, LC
Hu, J
Agarwal, A
Date Issued
2019
Journal
Applied Physics Letters
Publisher
AIP Publishing
Version
Final published version
Abstract
© 2019 Author(s). We demonstrate a monolithic waveguide sensor integrated with a detector on-chip for mid-infrared absorption spectroscopic sensing. The optical sensing element comprises a chalcogenide glass spiral waveguide, and the detector is a PbTe photoconductor integrated directly with the chalcogenide waveguide. The limit of detection of the sensor for methane gas was experimentally assessed to be 1% by volume. Further optimization of the fabrication process and normalization of the laser power fluctuations should result in a maximum sensitivity of 330 ppmv.
MIT Department
Massachusetts Institute of Technology. Department of Materials Science and Engineering
MIT Materials Research Laboratory
Terms of Use
Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use.
Persistent DSpace Link
DOI of Published Version
https://doi.org/10.1063/1.5053599
