Contact resistance in flat thin films
Name
Read-2009-Contact resistance in flat thin films.pdf
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286.83 KB
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Author(s)
Lang, Jeffrey H.
Read, Melissa B.
Martens, R.
Slocum, Alexander H.
Date Issued
October 2009
Journal
Proceedings of the 55th IEEE Holm Conference on Electrical Contacts, 2009
Publisher
Institute of Electrical and Electronics Engineers
Citation
Read, M. B. et al. “Contact Resistance in Flat Thin Films.” Electrical Contacts, 2009 Proceedings of the 55th IEEE Holm Conference on. 2009. 303-309. ©2009 IEEE.
Version
Final published version
Abstract
MEMS-fabricated electrical contacts are commonly
used in MEMS relays. These electrical contacts can be as simple
as two flat surfaces coming into contact [1]. Modeling their
contact force/resistance relationship can be difficult because
much of the theory on contact resistance was developed for
macro-scale contacts [2], and contact properties for MEMS-scale
contacts do not always agree with those predicted by this theory
[3]. One contribution to this disagreement is that when the
dimensions of the contact thickness are on the order of the a-spot
dimensions, the spreading resistance is affected [4]. In order to
determine the relationship between contact force and resistance
for a wide range of parameters, we have developed a two-coupon
test system which allows the properties of these contacts to be
empirically determined. The design of the two-coupon system
allows for the rapid fabrication of multiple contact materials and
geometries. The two-coupon system was used to test the contact
resistance properties of sputtered and electroplated Au films in
thicknesses of 0.1 μm, 0.3 μm, and 0.5 μm. Contact force was
measured using a custom flexural force gauge and the 4-point
contact resistance was measured using an integrated Kelvin
Structure [5]. The results are compared to traditional Holm
theory to determine the effects of film thickness on spreading
resistance.
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Massachusetts Institute of Technology. Department of Mechanical Engineering
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Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use.
Persistent DSpace Link
DOI of Published Version
https://doi.org/10.1109/HOLM.2009.5284385
