Two-dimensional simulation of radio-frequency glow discharges

Huppert, Gilbert Lee

Two-dimensional simulation of radio-frequency glow discharges

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34791347-MIT.pdf

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Author(s)

Huppert, Gilbert Lee

Advisor(s)

Herbert H. Sawin and Robert A. Brown.

Date Issued

1996

Publisher

Massachusetts Institute of Technology

Description

Thesis (Sc. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1996.

Includes bibliographical references (leaves 151-155).

Subjects

Chemical Engineering

MIT Department

Massachusetts Institute of Technology. Department of Chemical Engineering

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http://hdl.handle.net/1721.1/40574