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Research Laboratory for Electronics (RLE)
RLE Progress Reports
RLE Progress Report, No. 127 (1985)
Focused Ion Beam Fabrication
Focused Ion Beam Fabrication
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Name
RLE_PR_127_03.pdf
Size
153.9 KB
Format
Adobe PDF
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635f3c98bccd351a8bdeea79f61e5010
Author(s)
Melngailis, John
•
Musil, Christian R.
•
Stevens, Eugene H.
•
Utlaut, Mark
•
Geis, Michael W.
•
Mountain, Robert W.
•
Lezec, Henri J.
•
Kellog, Edwin
Date Issued
January 1985
Publisher
Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT)
Series/Report no.
Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 127
Description
Contains reports on three research projects.
Terms of Use
Copyright (c) 2008 by the Massachusetts Institute of Technology. All rights reserved.
Persistent DSpace Link
http://hdl.handle.net/1721.1/56945
