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Focused Ion Beam Fabrication

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RLE_PR_127_03.pdf

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Author(s)
Melngailis, John
•
Musil, Christian R.
•
Stevens, Eugene H.
•
Utlaut, Mark
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Geis, Michael W.
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Mountain, Robert W.
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Lezec, Henri J.
•
Kellog, Edwin
Date Issued
January 1985
Publisher
Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT)
Series/Report no.
Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 127
Description
Contains reports on three research projects.
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Copyright (c) 2008 by the Massachusetts Institute of Technology. All rights reserved.
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