Material transport and reaction effects in surface typography evolution during plasma etching

Arnold, John Christopher, 1964-

Material transport and reaction effects in surface typography evolution during plasma etching

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Author(s)

Arnold, John Christopher, 1964-

Advisor(s)

Herbert H. Sawin.

Date Issued

1995

Publisher

Massachusetts Institute of Technology

Description

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1995.

Includes bibliographical references (leaves 318-324).

Subjects

Chemical Engineering

MIT Department

Massachusetts Institute of Technology. Department of Chemical Engineering

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