Benchmarking semiconductor lithography equipment development & sourcing practices among leading-edge U.S. manufacturers
Name
33979449-MIT.pdf
Description
Full printable version
Size
4.71 MB
Format
Adobe PDF
Checksum (MD5)
12a38989a30f57b6e8b3d989e79979dd
Author(s)
Pieczulewski, Charles N. (Charles Nicholas)
Advisor(s)
Charles H. Fine.
Date Issued
1995
Publisher
Massachusetts Institute of Technology
Description
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1995.
Includes bibliographical references.
Subjects
Materials Science and Engineering
MIT Department
Massachusetts Institute of Technology. Department of Materials Science and Engineering
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