Data processing in nanoscale profilometry
Name
46972935-MIT.pdf
Description
Full printable version
Size
7.96 MB
Format
Adobe PDF
Checksum (MD5)
52d67963eddc6b3661a41d73333e3440
Author(s)
Chiu, Cheng-Jung
Advisor(s)
Kamal Youcef-Toumi.
Date Issued
1995
Publisher
Massachusetts Institute of Technology
Abstract
New developments on the nanoscale are taking place rapidly in many fields. Instrumentation used to measure and understand the geometry and property of the small scale structure is therefore essential. One of the most promising devices to head the measurement science into the nanoscale is the scanning probe microscope. A prototype of a nanoscale profilometer based on the scanning probe microscope has been built in the Laboratory for Manufacturing and Productivity at MIT. A sample is placed on a precision flip stage and different sides of the sample are scanned under the SPM to acquire its separate surface topography. To reconstruct the original three dimensional profile, many techniques like digital filtering, edge identification, and image matching are investigated and implemented in the computer programs to post process the data, and with greater emphasis placed on the nanoscale application. The important programming issues are addressed, too. Finally, this system's error sources are discussed and analyzed.
Description
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1995.
Includes bibliographical references (p. 176-177).
Subjects
Mechanical Engineering.
MIT Department
Massachusetts Institute of Technology. Department of Mechanical Engineering
Terms of Use
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