Nanomaterials Based Micro/Nanoelectromechanical System (MEMS and NEMS) Devices
Name
micromachines-15-00175.pdf
Size
3.68 MB
Format
Adobe PDF
Checksum (MD5)
04900cfa4429474b85696e4b6d0bc3d3
Author(s)
Torkashvand, Ziba
Shayeganfar, Farzaneh
Ramazani, Ali
Date Issued
January 24, 2024
Publisher
Multidisciplinary Digital Publishing Institute
Citation
Micromachines 15 (2): 175 (2024)
Version
Final published version
Abstract
The micro- and nanoelectromechanical system (MEMS and NEMS) devices based on two-dimensional (2D) materials reveal novel functionalities and higher sensitivity compared to their silicon-base counterparts. Unique properties of 2D materials boost the demand for 2D material-based nanoelectromechanical devices and sensing. During the last decades, using suspended 2D membranes integrated with MEMS and NEMS emerged high-performance sensitivities in mass and gas sensors, accelerometers, pressure sensors, and microphones. Actively sensing minute changes in the surrounding environment is provided by means of MEMS/NEMS sensors, such as sensing in passive modes of small changes in momentum, temperature, and strain. In this review, we discuss the materials preparation methods, electronic, optical, and mechanical properties of 2D materials used in NEMS and MEMS devices, fabrication routes besides device operation principles.
MIT Department
Massachusetts Institute of Technology. Department of Mechanical Engineering
Terms of Use
Creative Commons Attribution
Persistent DSpace Link
DOI of Published Version
https://doi.org/10.3390/mi15020175
