Chemical vapour deposition
Name
43586_2020_5_ReferencePDF.pdf
Size
10.87 MB
Format
Adobe PDF
Checksum (MD5)
1fdeec5cf03b193a19ef7de82eae1491
Author(s)
Sun, Luzhao
Yuan, Guowen
Gao, Libo
Yang, Jieun
Chhowalla, Manish
Gharahcheshmeh, Meysam H
Gleason, Karen K
Choi, Yong S
Hong, Byung H
Liu, Zhongfan
Date Issued
January 14, 2021
Publisher
Nature Publishing Group UK
Citation
Nature Reviews Methods Primers. 2021 Jan 14;1(1):5
Version
Author's final manuscript
MIT Department
Massachusetts Institute of Technology. Department of Chemical Engineering
Terms of Use
Creative Commons Attribution-Noncommercial-Share Alike
Persistent DSpace Link
DOI of Published Version
https://doi.org/10.1038/s43586-020-00005-y
