Surface kinetic study of ion induced chemical vapor deposition of copper
Name
41554186-MIT.pdf
Description
Full printable version
Size
10.08 MB
Format
Adobe PDF
Checksum (MD5)
280303e2c57610999cb05626ad0bda9f
Author(s)
Chiang, Tony Ping-chen
Advisor(s)
Herbert H. Swain and Carl V. Thompson. II.
Date Issued
1996
Publisher
Massachusetts Institute of Technology
Description
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1996.
Includes bibliographical references (leaves 158-162).
Subjects
Materials Science and Engineering
MIT Department
Massachusetts Institute of Technology. Department of Materials Science and Engineering
Terms of Use
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