Non-perfluorocompound chemistries for plasma etching of dielectrics
Name
36004255-MIT.pdf
Description
Full printable version
Size
11.2 MB
Format
Adobe PDF
Checksum (MD5)
b0d0bd3a3c8bed921925a81a6e2e3128
Author(s)
Tao, Benjamin A. (Benjamin Albert)
Advisor(s)
L. Rafael Reif.
Date Issued
1996
Publisher
Massachusetts Institute of Technology
Description
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1996.
Includes bibliographical references (p. 108-111).
Subjects
Materials Science and Engineering
MIT Department
Massachusetts Institute of Technology. Department of Materials Science and Engineering
Terms of Use
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