Measuring thickness in thin NbN films for superconducting devices
Name
1812.05559.pdf
Description
Accepted version
Size
243.55 KB
Format
Unknown
Checksum (MD5)
0ae2ae1baebc1f046eda65b7dba63709
Author(s)
Medeiros, Owen
Colangelo, Marco
Charaev, Ilya
Berggren, Karl K
Date Issued
2019
Journal
Journal of Vacuum Science and Technology A Vacuum Surfaces and Films
Publisher
American Vacuum Society
Version
Author's final manuscript
Abstract
© 2019 Author(s). The authors present the use of a commercially available fixed-angle multiwavelength ellipsometer for quickly measuring the thickness of NbN thin films for the fabrication and performance improvement of superconducting nanowire single photon detectors. The process can determine the optical constants of absorbing thin films, removing the need for inaccurate approximations. The tool can be used to observe oxidation growth and allows thickness measurements to be integrated into the characterization of various fabrication processes.
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Terms of Use
Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use.
Persistent DSpace Link
DOI of Published Version
https://doi.org/10.1116/1.5088061
