Non-contact defect detection in silicon
Name
11758639-MIT.pdf
Description
Full printable version
Size
6.99 MB
Format
Adobe PDF
Checksum (MD5)
0a978dae046689780b6a2acfe92daebd
Author(s)
Olyha, Robert Stephen
Advisor(s)
Mildred S. Dresselhaus.
Date Issued
1984
Publisher
Massachusetts Institute of Technology
Description
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1984.
MICROFICHE COPY AVAILABLE IN ARCHIVES AND ENGINEERING.
Bibliography: leaves 132-143.
Subjects
Electrical Engineering and Computer Science.
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Terms of Use
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