A six-degree-of-freedom compliant micro-manipulator for silicon optical bench

Chen, Shih-Chi, 1977-

A six-degree-of-freedom compliant micro-manipulator for silicon optical bench

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Author(s)

Chen, Shih-Chi, 1977-

Advisor(s)

Martin L. Culpepper.

Date Issued

2003

Publisher

Massachusetts Institute of Technology

Description

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2003.

Includes bibliographical references (leaves 111-113).

Subjects

Mechanical Engineering.

MIT Department

Massachusetts Institute of Technology. Department of Mechanical Engineering

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http://hdl.handle.net/1721.1/89396