Electromechanically reconfigurable optical nano-kirigami
Name
s41467-021-21565-x.pdf
Description
Published version
Size
2.4 MB
Format
Adobe PDF
Checksum (MD5)
b28a2ceac792f4727df1a5c3763e1e0d
Author(s)
Chen, Shanshan
Liu, Zhiguang
Du, Huifeng
Tang, Chengchun
Ji, Chang-Yin
Quan, Baogang
Pan, Ruhao
Yang, Lechen
Li, Xinhao
Gu, Changzhi
Date Issued
2021
Journal
Nature Communications
Publisher
Springer Science and Business Media LLC
Citation
Chen, Shanshan, Liu, Zhiguang, Du, Huifeng, Tang, Chengchun, Ji, Chang-Yin et al. 2021. "Electromechanically reconfigurable optical nano-kirigami." Nature Communications, 12 (1).
Version
Final published version
Abstract
© 2021, The Author(s). Kirigami, with facile and automated fashion of three-dimensional (3D) transformations, offers an unconventional approach for realizing cutting-edge optical nano-electromechanical systems. Here, we demonstrate an on-chip and electromechanically reconfigurable nano-kirigami with optical functionalities. The nano-electromechanical system is built on an Au/SiO2/Si substrate and operated via attractive electrostatic forces between the top gold nanostructure and bottom silicon substrate. Large-range nano-kirigami like 3D deformations are clearly observed and reversibly engineered, with scalable pitch size down to 0.975 μm. Broadband nonresonant and narrowband resonant optical reconfigurations are achieved at visible and near-infrared wavelengths, respectively, with a high modulation contrast up to 494%. On-chip modulation of optical helicity is further demonstrated in submicron nano-kirigami at near-infrared wavelengths. Such small-size and high-contrast reconfigurable optical nano-kirigami provides advanced methodologies and platforms for versatile on-chip manipulation of light at nanoscale.
MIT Department
Massachusetts Institute of Technology. Department of Mechanical Engineering
Terms of Use
Creative Commons Attribution 4.0 International license
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DOI of Published Version
https://doi.org/10.1038/S41467-021-21565-X
