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  4. RLE Progress Report, No. 129 (1987)
  5. Submicron Structures Technology and Research

Submicron Structures Technology and Research

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RLE_PR_129_01.pdf

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Author(s)
Anderson, Erik H.
•
Carter, James M.
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Chu, William
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Komatsu, Kazu
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Quek, Hui Meng
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Yen, Anthony T.
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Plotnik, Irving
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Schattenburg, Mark L.
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Smith, Henry I.
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Akhtar, Salmon
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Date Issued
January 1987
Publisher
Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT)
Series/Report no.
Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 129
Description
Contains reports on sixteen research projects.
Terms of Use
Copyright (c) 2008 by the Massachusetts Institute of Technology. All rights reserved.
Persistent DSpace Link
http://hdl.handle.net/1721.1/57008
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