A complete MEMS analysis system and implementation
Name
46930195-MIT.pdf
Description
Full printable version
Size
4.89 MB
Format
Adobe PDF
Checksum (MD5)
a5e9e7bde90f7dcd810ea907e2152ddb
Author(s)
Tang, Xudong, 1967-
Advisor(s)
Donald E. Troxel.
Alternative Title
Complete microelectromechanical systems analysis system and implementation
Date Issued
2000
Publisher
Massachusetts Institute of Technology
Description
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2000.
Includes bibliographical references (p. 60).
Subjects
Electrical Engineering and Computer Science.
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Terms of Use
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