Characterization of mechanical and optical properties of x-ray mask membranes

Name

RLE-TR-564-24101829.pdf

Size

1.96 MB

Format

Adobe PDF

Checksum (MD5)

49b57a647a2aa1cdf1f8566de3c81ace

Date Issued

1991

Publisher

Research Laboratory of Electronics, Massachusetts Institute of Technology

Series/Report no.

Technical report (Massachusetts Institute of Technology. Research Laboratory of Electronics) ; 564.

Description

Includes bibliographical references (leaves 48-49).

MIT Department

Massachusetts Institute of Technology. Research Laboratory of Electronics

Persistent DSpace Link