Statistical metrology of interlevel dieletric thickness
Name
33343451-MIT.pdf
Description
Full printable version
Size
3.93 MB
Format
Adobe PDF
Checksum (MD5)
43e508084efb61391a67dacc2416d0e0
Author(s)
Maung, Tinaung Daniel
Advisor(s)
Duane Boning.
Date Issued
1995
Publisher
Massachusetts Institute of Technology
Description
Thesis (M. Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1995.
Includes bibliographical references (leaves 60-62).
Subjects
Electrical Engineering and Computer Science
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Terms of Use
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