Characterization of Diamond-Like Film after Focused Ion Beam Processing
Name
IMST002.pdf
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73.98 KB
Format
Adobe PDF
Checksum (MD5)
0222fcd665b3573f842774de900b8216
Author(s)
Fu, Yongqi
Ngoi, Kok Ann Bryan
Date Issued
January 2003
Series/Report no.
Innovation in Manufacturing Systems and Technology (IMST);
Abstract
Optical properties (transmission and refractive index) and chemical structure (XPS) of diamond-like coating (DLC) film before and after focused ion beam milling (FIBM) process, were investigated in this paper. It is shown by our FIBM experiment that influence of FIBM on Optical properties and chemical structure of the DLC film is not apparent, especially in near-infra region. The film still can be used for optical applications. As an application example, diffractive optical element (DOE) was directly fabricated on the film by use of FIBM. Measured diffraction efficiency of the DOE is 73%, which is acceptable for conventional use.
Subjects
DLC
FIBM
optical properties
XPS
Persistent DSpace Link
