Trapping characteristics and parametric shifts in lateral GaN HEMTs with SiO₂/AlGaN gate stacks
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Author(s) • • • • • • •
King, M. P.
Dickerson, J. R.
DasGupta, S.
Marinella, M. J.
Kaplar, R. J.
Piedra, Daniel
Sun, Min
Palacios, Tomas
Date Issued
June 2015
Journal
2015 IEEE International Reliability Physics Symposium
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Citation
King, M. P.; Dickerson, J. R.; DasGupta, S.; Marinella, M. J.; Kaplar, R. J.; Piedra, D.; Sun, M. and Palacios, T. “Trapping Characteristics and Parametric Shifts in Lateral GaN HEMTs with SiO₂/AlGaN Gate Stacks.” 2015 IEEE International Reliability Physics Symposium (April 2015). © 2015 Institute of Electrical and Electronics Engineers (IEEE)
Version
Final published version
Abstract
Recovery transients following blocking-state voltage stress are analyzed for two types of AlGaN/GaN HEMTs, one set of devices with thick AlGaN barrier layers and another with recessed-gate geometry and ALD SiO₂ gate dielectric. Results show temperature-invariant emission processes are present in both devices. Recessed-gate devices with SiO₂ dielectrics are observed to exhibit simultaneous trapping and emission processes during post-stress recovery.
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Persistent DSpace Link
DOI of Published Version
https://doi.org/10.1109/IRPS.2015.7112689