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  4. Trapping characteristics and parametric shifts in lateral GaN HEMTs with SiO₂/AlGaN gate stacks

Trapping characteristics and parametric shifts in lateral GaN HEMTs with SiO₂/AlGaN gate stacks

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Author(s)
King, M. P.
•
Dickerson, J. R.
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DasGupta, S.
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Marinella, M. J.
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Kaplar, R. J.
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Piedra, Daniel
•
Sun, Min
•
Palacios, Tomas
Date Issued
June 2015
Journal
2015 IEEE International Reliability Physics Symposium
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Citation
King, M. P.; Dickerson, J. R.; DasGupta, S.; Marinella, M. J.; Kaplar, R. J.; Piedra, D.; Sun, M. and Palacios, T. “Trapping Characteristics and Parametric Shifts in Lateral GaN HEMTs with SiO₂/AlGaN Gate Stacks.” 2015 IEEE International Reliability Physics Symposium (April 2015). © 2015 Institute of Electrical and Electronics Engineers (IEEE)
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Abstract
Recovery transients following blocking-state voltage stress are analyzed for two types of AlGaN/GaN HEMTs, one set of devices with thick AlGaN barrier layers and another with recessed-gate geometry and ALD SiO₂ gate dielectric. Results show temperature-invariant emission processes are present in both devices. Recessed-gate devices with SiO₂ dielectrics are observed to exhibit simultaneous trapping and emission processes during post-stress recovery.
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Persistent DSpace Link
http://hdl.handle.net/1721.1/108328
DOI of Published Version
https://doi.org/10.1109/IRPS.2015.7112689
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