A MEMS Magnetic-Based Vibration Energy Harvester
Name
Shin_2018_J._Phys.__Conf._Ser._1052_012082.pdf
Description
Published version
Size
522.55 KB
Format
Adobe PDF
Checksum (MD5)
dc7e3f0d5e7c6aa357cebd5164bd941b
Author(s)
Shin, Abraham
Radhakrishna, Ujwal
Yang, Yuechen
Zhang, Q.
Gu, L.
Riehl, P.
Chandrakasan, Anantha P
Lang, Jeffrey H
Date Issued
July 2018
Journal
Journal of Physics: Conference Series
Publisher
IOP Publishing
Citation
Shin, A. et al. "A MEMS Magnetic-Based Vibration Energy Harvester." 17th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, Journal of Physics: Conference Series, 1052, IOP Publishing, 2018, 012082.
Version
Final published version
Abstract
This paper presents the design, analysis and integrated fabrication of a MEMS magnetic-based vibration energy harvester targeted for machine health monitoring. The design consists of Si-springs, permanent magnets as mass, and coils wound on the top and bottom side of the harvester package for mechanical-to-electrical energy conversion based on the Lorentz-force principle. The harvester is optimized to have its translational resonant-mode match external vibrations while separating higher-order modes. Mechanical and magnetic optimization of the harvester is carried out together with optimization of its power and control electronics in order to provide maximum output power from a vibration input that can vary its frequency by ±5%. The harvester achieves an open-circuit voltage amplitude of 145 mV and delivers 165 μW to a matched load at the resonance frequency of 45.7 Hz.
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Massachusetts Institute of Technology. Research Laboratory of Electronics
Terms of Use
Creative Commons Attribution 3.0 unported license
Persistent DSpace Link
DOI of Published Version
https://doi.org/10.1088/1742-6596/1052/1/012082
