New Generation of Digital Microfluidic Devices
Name
Kedzierski-2009-New Generation of Digital Microfluidic Devices.pdf
Size
1.14 MB
Format
Adobe PDF
Checksum (MD5)
c45c1247b08143e4451f30d43d725dd1
Author(s)
Abedian, Behrouz
Berry, Shaun R.
Kedzierski, Jakub T.
Date Issued
July 2009
Journal
Journal of Microelectromechanical Systems
Publisher
Institute of Electrical and Electronics Engineers
Citation
Kedzierski, J., S. Berry, and B. Abedian. “New Generation of Digital Microfluidic Devices.” Microelectromechanical Systems, Journal of 18.4 (2009): 845-851. ©2009 Institute of Electrical and Electronics Engineers.
Version
Final published version
Abstract
This paper reports on the design, fabrication, and performance of micro-sized fluidic devices that use electrowetting to control and transport liquids. Using standard microfabrication techniques, new pumping systems are developed with significantly more capability than open digital microfluidic systems that are often associated with electrowetting. This paper demonstrates that, by integrating closed microchannels with different channel heights and using electrowetting actuation, liquid interfaces can be controlled, and pressure work can be done, resulting in fluid pumping. The operation of two different on-chip pumps and devices that can form water drops is described. In addition, a theory is presented to explain the details of single-electrode actuation in a closed channel.
Subjects
surface tension
micropumps
microfluidics
microchannels
electrowetting
electrocapillary
CYTOP
digital microfluidics
MIT Department
Lincoln Laboratory
Terms of Use
Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use.
Persistent DSpace Link
DOI of Published Version
https://doi.org/10.1109/jmems.2009.2023845
