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Optical metrology of thin films

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Author(s)
Logan, Randy
Advisor(s)
Keith A. Nelson.
Date Issued
1997
Publisher
Massachusetts Institute of Technology
Description
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1997.
Includes bibliographical references (leaf 75).
Subjects
Materials Science and Engineering
MIT Department
Massachusetts Institute of Technology. Department of Materials Science and Engineering
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http://dspace.mit.edu/handle/1721.1/7582
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http://hdl.handle.net/1721.1/46094
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