Optical metrology of thin films

Logan, Randy

Optical metrology of thin films

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Author(s)

Logan, Randy

Advisor(s)

Keith A. Nelson.

Date Issued

1997

Publisher

Massachusetts Institute of Technology

Description

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1997.

Includes bibliographical references (leaf 75).

Subjects

Materials Science and Engineering

MIT Department

Massachusetts Institute of Technology. Department of Materials Science and Engineering

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