Optical and mechanical characterization of thin membranes for X-ray lithography
Name
31163454-MIT.pdf
Description
Full printable version
Size
2.74 MB
Format
Adobe PDF
Checksum (MD5)
839cc0bf6ad50e25fdffcd3399844a48
Author(s)
Owen, Gabrielle M. (Gabrielle Marie)
Advisor(s)
Henry I. Smith.
Date Issued
1994
Publisher
Massachusetts Institute of Technology
Description
Thesis (M. Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1994.
Includes bibliographical references (leaves 60-61).
Subjects
Electrical Engineering and Computer Science
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Terms of Use
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