Optical system for high-speed Atomic Force Microscope
Name
707090925-MIT.pdf
Description
Full printable version
Size
25.51 MB
Format
Adobe PDF
Checksum (MD5)
f02a31723212bea462213fe317e167eb
Author(s)
Lim, Kwang Yong, S.M. Massachusetts Institute of Technology
Advisor(s)
Kamal Youcef-Toumi.
Alternative Title
Optical system for high-speed AFM
Date Issued
2010
Publisher
Massachusetts Institute of Technology
Abstract
This thesis presents the design and development of an optical cantilever deflection sensor for a high speed Atomic Force Microscope (AFM). This optical sensing system is able to track a small cantilever while the X-Y scanner moves in the X-Y plane at 1KHz over a large range of 50x50 microns. To achieve these requirements, we evaluated a number of design concepts among which the lever method and the fiber collimator method were selected. Experiments were performed to characterize the performance of the integrated AFM and to show that the cantilever tracking while the scanner is in operation was accomplished. A triangular grating was imaged with the lever method optical subassembly integrated with the scanner to demonstrate the effectiveness of the approach.
Description
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2010.
Cataloged from PDF version of thesis.
Includes bibliographical references (p. 191-192).
Subjects
Mechanical Engineering.
MIT Department
Massachusetts Institute of Technology. Department of Mechanical Engineering
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