The study of radiation effects in emerging micro and nano electro mechanical systems (M and NEMs)
Name
The Study of Radiation Effects in Emerging Micro and Nano Electro Mechanical Systems (M&NEMs).pdf
Size
607.77 KB
Format
Adobe PDF
Checksum (MD5)
f779f12700f665a3cecad01ca2b335bb
Author(s)
Arutt, Charles N
Alles, Michael L
Liao, Wenjun
Gong, Huiqi
Davidson, Jim L
Schrimpf, Ronald D
Reed, Robert A
Weller, Robert A
Bolotin, Kirill
Nicholl, Ryan
Date Issued
December 2016
Journal
Semiconductor Science and Technology
Publisher
IOP Publishing
Citation
Arutt, Charles N et al. “The Study of Radiation Effects in Emerging Micro and Nano Electro Mechanical Systems (M and NEMs).” Semiconductor Science and Technology 32, 1 (December 2016): 013005 © 2016 IOP Publishing Ltd
Version
Author's final manuscript
Abstract
The potential of micro and nano electromechanical systems (M and NEMS) has expanded due to advances in materials and fabrication processes. A wide variety of materials are now being pursued and deployed for M and NEMS including silicon carbide (SiC), III–V materials, thin-film piezoelectric and ferroelectric, electro-optical and 2D atomic crystals such as graphene, hexagonal boron nitride (h-BN), and molybdenum disulfide (MoS₂). The miniaturization, functionality and low-power operation offered by these types of devices are attractive for many application areas including physical sciences, medical, space and military uses, where exposure to radiation is a reliability consideration. Understanding the impact of radiation on these materials and devices is necessary for applications in radiation environments.
MIT Department
Massachusetts Institute of Technology. Department of Materials Science and Engineering
Terms of Use
Creative Commons Attribution-Noncommercial-Share Alike
Persistent DSpace Link
DOI of Published Version
https://doi.org/10.1088/1361-6641/32/1/013005
