RF MEMS switches : survey and analysis
Name
505599029-MIT.pdf
Description
Full printable version
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39.12 MB
Format
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2c9a4e8fe58b850d6dddecd8bf9c9bcd
Author(s)
Machal-Cajigas, Antoinne Y
Advisor(s)
Jeffrey H. Lang and Bryan Johnson.
Date Issued
2009
Publisher
Massachusetts Institute of Technology
Abstract
Microelectromechanical systems known as MEMS, are an enabling technology that describe a field capable of creating very small electromechanical devices with feature sizes on the order of microns, or 10-6 meters. MEMS technology has received considerable attention recently as a way to produce switches. The technology leverages the fabrication instruments, processing and design techniques of the mature integrated circuit (IC) industry. While MEMS technology has shown great successes in producing commercial devices like accelerometers and pressure sensors, the same has not been true for switches. MEMS switches have shown great RF characteristics via low losses and high isolation. However, they possess several important shortcomings. At present, RF MEMS switches have low reliability, limited power handling capabilities, and slow switching times. Nonetheless, MEMS switches are poised to provide advantages over other switching technologies. The goal of this thesis is to understand the limits of their operation and predict their impact in practical applications. To that end, this thesis surveys the present state of the art of MEMS RF switches, identifies the benefits and drawbacks of switches created using this technology, and formulates predictions for the future of MEMS RF switches.
Description
Thesis (M. Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2009.
Includes bibliographical references (p. 95-97).
Subjects
Electrical Engineering and Computer Science.
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
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