Electrostatic pull-in test structure design for in-situ mechanical property measurements of microelectromechanical systems (MEMS)
Name
37658953-MIT.pdf
Description
Full printable version
Size
6.18 MB
Format
Adobe PDF
Checksum (MD5)
a4bd78e7f054c41fccd65ed1f489b70b
Author(s)
Gupta, Raj K., Ph. D. 1969-
Advisor(s)
Stephen D. Senturia.
Date Issued
1997
Publisher
Massachusetts Institute of Technology
Description
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1997.
Includes bibliographical references (leaves 59-64).
Subjects
Electrical Engineering and Computer Science
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Terms of Use
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