Piezo-optomechanical cantilever modulators for VLSI visible photonics
Name
2201.12447.pdf
Description
Accepted version
Size
1.3 MB
Format
Adobe PDF
Checksum (MD5)
ef3be914edbb75bde3c8b9a49f141c19
Author(s)
Dong, Mark
Heim, David
Witte, Alex
Clark, Genevieve
Leenheer, Andrew J
Dominguez, Daniel
Zimmermann, Matthew
Wen, Y Henry
Gilbert, Gerald
Englund, Dirk
Date Issued
May 1, 2022
Journal
APL Photonics
Publisher
AIP Publishing
Citation
Dong, Mark, Heim, David, Witte, Alex, Clark, Genevieve, Leenheer, Andrew J et al. 2022. "Piezo-optomechanical cantilever modulators for VLSI visible photonics." APL Photonics, 7 (5).
Version
Author's final manuscript
Abstract
Visible-wavelength very large-scale integration photonic circuits have a potential to play important roles in quantum information and sensing technologies. The realization of scalable, high-speed, and low-loss photonic mesh circuits depends on reliable and well-engineered visible photonic components. Here, we report a low-voltage optical phase shifter based on piezo-actuated mechanical cantilevers, fabricated on a CMOS compatible, 200 mm wafer-based visible photonics platform. We show linear phase and amplitude modulation with 6 Vπ cm in differential operation, −1.5 to −2 dB insertion loss, and up to 40 dB contrast in the 700–780 nm range. By adjusting selected cantilever parameters, we demonstrate a low-displacement and a high-displacement device, both exhibiting a nearly flat frequency response from DC to a peak mechanical resonance at 23 and 6.8 MHz respectively, which, through resonant enhancement of Q ∼ 40, further decreases the operating voltage down to 0.15 Vπ cm.
MIT Department
Massachusetts Institute of Technology. Research Laboratory of Electronics
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Creative Commons Attribution-Noncommercial-Share Alike
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DOI of Published Version
https://doi.org/10.1063/5.0088424
