Fabrication methods and performance of low-permeability microfluidic components for a miniaturized wearable drug delivery system
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Mescher-2009-Fabrication methods and performance of low-permeability microfluidic components for a miniaturized wearable drug delivery system.pdf
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Author(s) • • • • • • •
Mescher, Mark J.
Swan, Erin Leary
Fiering, Jason
Holmboe, Maria E.
Sewell, William F.
Kujawa, Sharon G.
McKenna, Michael J.
Borenstein, Jeffrey T.
Date Issued
June 2009
Journal
Journal of Microelectromechanical Systems
Publisher
Institute of Electrical and Electronics Engineers
Citation
Mescher, M.J. et al. “Fabrication Methods and Performance of Low-Permeability Microfluidic Components for a Miniaturized Wearable Drug Delivery System.” Microelectromechanical Systems, Journal of 18.3 (2009): 501-510. © Copyright 2010 IEEE
Version
Final published version
Abstract
In this paper, we describe low-permeability components of a microfluidic drug delivery system fabricated with versatile micromilling and lamination techniques. The fabrication process uses laminate sheets which are machined using XY milling tables commonly used in the printed-circuit industry. This adaptable platform for polymer microfluidics readily accommodates integration with silicon-based sensors, printed-circuit, and surface-mount technologies. We have used these methods to build components used in a wearable liquid-drug delivery system for in vivo studies. The design, fabrication, and performance of membrane-based fluidic capacitors and manual screw valves provide detailed examples of the capability and limitations of the fabrication method. We demonstrate fluidic capacitances ranging from 0.015 to 0.15 muL/kPa, screw valves with on/off flow ratios greater than 38000, and a 45times reduction in the aqueous fluid loss rate to the ambient due to permeation through a silicone diaphragm layer.
MIT Department
Massachusetts Institute of Technology. Department of Mechanical Engineering
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DOI of Published Version
https://doi.org/10.1109/JMEMS.2009.2015484