Scaling relationships for power deposition and ion bombardment in radio-frequency plasmas

Liu, Joanne

Scaling relationships for power deposition and ion bombardment in radio-frequency plasmas

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28153004-MIT.pdf

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32be598003d07bb70973add3c3b68b06

Author(s)

Liu, Joanne

Advisor(s)

Herbert H. Sawin.

Date Issued

1993

Publisher

Massachusetts Institute of Technology

Description

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1993.

Includes bibliographical references (p. 207-213).

Subjects

Chemical Engineering

MIT Department

Massachusetts Institute of Technology. Department of Chemical Engineering

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