Inorganic x-ray mask technology for quantum-effect devices

Name

RLE-TR-577-28270867.pdf

Size

9.15 MB

Format

Adobe PDF

Checksum (MD5)

aebd6c38931325e4cfa97d9eeab7a63e

Date Issued

1993

Publisher

Research Laboratory of Electronics, Massachusetts Institute of Technology

Series/Report no.

Technical report (Massachusetts Institute of Technology. Research Laboratory of Electronics) ; 577.

Description

Includes bibliographical references (p. 116-123).

MIT Department

Massachusetts Institute of Technology. Research Laboratory of Electronics

Persistent DSpace Link