Nonplanar Nanofabrication via Interface Engineering
Name
Spector-sspector-SM-EECS-2023-thesis.pdf
Description
Thesis PDF
Size
9.96 MB
Format
Adobe PDF
Checksum (MD5)
4682a95eb13ad4a89c216d1ab50c108c
Author(s)
Spector, Sarah O.
Advisor(s)
Niroui, Farnaz
Date Issued
February 2023
Publisher
Massachusetts Institute of Technology
Abstract
This thesis develops a platform for scalable fabrication of suspended, ultrathin nanostructures as building blocks of nanoelectromechanical systems by extending conventional planar techniques to nonplanar designs. We achieve this by engineering interface forces through a patterned molecular monolayer to enable controlled delamination of a deposited thin-film in predetermined locations. This allows us to form nonplanar structures with thicknesses < 10 nm and nanogaps reaching < 10 nm – features traditionally challenging to achieve. Our approach, which builds on standard, wafer-scale, and conventionally-compatible techniques, is versatile, tunable, and compatible with diverse materials. As a result, the technique opens up new opportunities for applications such as miniaturized nanoelectromechanical devices, including ultrathin mechanical resonators, which are demonstrated in this work.
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
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