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  5. The geometric sensitivity analysis of electrostatic field for microelectromechanical system simulation

The geometric sensitivity analysis of electrostatic field for microelectromechanical system simulation

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Author(s)
Wang, Jungfeng, 1971-
Advisor(s)
Jacob White.
Date Issued
1997
Publisher
Massachusetts Institute of Technology
Description
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1997.
Includes bibliographical references (leaf 61).
Subjects
Electrical Engineering and Computer Science
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
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http://dspace.mit.edu/handle/1721.1/7582
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http://hdl.handle.net/1721.1/42668
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