A Six-Phase Multilevel Inverter for MEMS Electrostatic Induction Micromotors
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Neugebauer six-phase.pdf
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Author(s)
Neugebauer, Timothy C.
Perreault, David J.
Lang, Jeffrey H.
Livermore, Carol
Date Issued
February 2004
Journal
IEEE Transactions on Circuits and Systems II: Express Briefs
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Citation
Neugebauer, T.C., D.J. Perreault, J.H. Lang, and C. Livermore. “A Six-Phase Multilevel Inverter for MEMS Electrostatic Induction Micromotors.” IEEE Trans. Circuits Syst. II 51, no. 2 (February 2004): 49–56. © 2004 IEEE
Version
Final published version
Abstract
The construction of miniaturized rotating electric machines through microfabrication techniques is becoming a reality. Applications of such micromotors include miniaturized pumps, compressors, fans, coolers, and turbogenerators. However, the characteristics of these devices make the design of power electronics for them challenging. These characteristics include high-voltage and high frequency operation, tightly constrained operating waveforms and timing, and capacitive input impedances. This paper explores the design of power electronics for microfabricated electrostatic induction machines. We describe the structure and operation of these machines, and establish the operating requirements of power converters for them. We provide a comparison of inverter topologies for this application, and propose an appropriate architecture. The design and experimental evaluation of a prototype six-phase, five-level inverter for this application is presented. The inverter operates at frequencies up to 2 MHz and at voltages up to 300 V, and meets the stringent waveform and timing constraints posed by this application.
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Massachusetts Institute of Technology. Department of Mechanical Engineering
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Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use.
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DOI of Published Version
https://doi.org/10.1109/TCSII.2003.822419
