Superconducting MoN thin films prepared by DC reactive magnetron sputtering for nanowire single-photon detectors
Name
2010.10634.pdf
Description
Submitted version
Size
6.02 MB
Format
Adobe PDF
Checksum (MD5)
6b5196848b4c15af897aca4b6477c0e4
Author(s)
Hallett, Lily
Charaev, Ilya
Agarwal, Akshay
Dane, Andrew
Colangelo, Marco
Zhu, Di
Berggren, Karl K
Date Issued
2021
Journal
Superconductor Science and Technology
Publisher
IOP Publishing
Citation
Hallett, Lily, Charaev, Ilya, Agarwal, Akshay, Dane, Andrew, Colangelo, Marco et al. 2021. "Superconducting MoN thin films prepared by DC reactive magnetron sputtering for nanowire single-photon detectors." Superconductor Science and Technology, 34 (3).
Version
Original manuscript
Abstract
© 2021 IOP Publishing Ltd. We present a comprehensive study of molybdenum nitride (MoN) thin film deposition using direct current reactive magnetron sputtering. We have investigated the effect of various deposition conditions on the superconducting and electrical properties of the films. Furthermore, we have shown that meander-shaped single-photon detectors made from 5 nm MoN films have saturated quantum detection efficiency at the telecom wavelength of 1550 nm. Our results indicate that MoN may be a material of interest for practical applications of low-temperature superconductors, including single-photon detectors and transition-edge sensors.
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Terms of Use
Creative Commons Attribution-NonCommercial-ShareAlike 4.0 International
Persistent DSpace Link
DOI of Published Version
https://doi.org/10.1088/1361-6668/ABDA5F
