The development of a prototype Zone-Plate-Array Lithography (ZPAL) system
Name
57384404-MIT.pdf
Description
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8.05 MB
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Checksum (MD5)
7eb83e2ac8168534a30c5f573774d4f8
Author(s)
Patel, Amil Ashok, 1979-
Advisor(s)
Henry I. Smith.
Date Issued
2004
Publisher
Massachusetts Institute of Technology
Abstract
The research presented in this paper aims to build a Zone-Plate-Array Lithography (ZPAL) prototype tool that will demonstrate the high-resolution, parallel patterning capabilities of the architecture. The experiment will require the integration of micromechanical spatial light modulators with an existing zone-plate-array testbed lithography tool. The system development requires an efficient data-delivery system to promote throughput and a thoughtful optical channel to optimize the lithographic performance of zone-plates. Lithography results obtained from the prototype will be presented along with basic performance characteristics.
Description
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2004.
Includes bibliographical references (p. 75-77).
Subjects
Electrical Engineering and Computer Science.
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
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