Electrochemical development of hydrogen silsesquioxane by applying an electrical potential
Name
Berggren-Electrochemical development.pdf
Size
930.78 KB
Format
Adobe PDF
Checksum (MD5)
00a9047c2ba9f66a603448d4b75e0d46
Author(s)
Strobel, Sebastian
Harry, Katherine J.
Duan, Huigao
Yang, Joel K. W.
Manfrinato, Vitor Riseti
Berggren, Karl K.
Date Issued
August 2011
Journal
Nanotechnology
Publisher
IOP Publishing
Citation
Strobel, Sebastian et al. “Electrochemical Development of Hydrogen Silsesquioxane by Applying an Electrical Potential.” Nanotechnology 22.37 (2011): 375301.
Version
Author's final manuscript
Abstract
We present a new method for developing hydrogen silsesquioxane (HSQ) by using electrical potentials and deionized water. Nested-L test structures with a pitch as small as 9 nm were developed using this electrochemical technique in saline solution without adding hydroxyl ions. Furthermore, we showed that high-resolution structures can be electrochemically developed in deionized water alone. Electrochemical development is controlled by the applied voltage and may overcome several of the limitations discussed for alkaline developers, such as poor hydroxyl anion diffusion and charge repulsion effects in small trenches.
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Terms of Use
Creative Commons Attribution-Noncommercial-Share Alike 3.0
Persistent DSpace Link
DOI of Published Version
https://doi.org/10.1088/0957-4484/22/37/375301
