Photo-electroforming, a new manufacturing process for micro-electro-mechanical systems

Tsao, Che-Chih

Photo-electroforming, a new manufacturing process for micro-electro-mechanical systems

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32599890-MIT.pdf

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Author(s)

Tsao, Che-Chih

Advisor(s)

.

Date Issued

1995

Publisher

Massachusetts Institute of Technology

Description

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1995.

Includes bibliographical references.

Subjects

Mechanical Engineering

MIT Department

Massachusetts Institute of Technology. Department of Mechanical Engineering

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