Experiment and simulation validated analytical equivalent circuit model for piezoelectric micromachined ultrasonic transducers
Name
EqCircTUFFC_Final_wNomen_Highlights.pdf
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4 MB
Format
Adobe PDF
Checksum (MD5)
32b40554d5fc42878773ee56263da8c1
Author(s)
Kim, Sang-Gook
Smyth, Katherine M.
Date Issued
April 2015
Journal
IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Citation
Smyth, Katherine, and Sang-Gook Kim. “Experiment and Simulation Validated Analytical Equivalent Circuit Model for Piezoelectric Micromachined Ultrasonic Transducers.” IEEE Trans. Ultrason., Ferroelect., Freq. Contr. 62, no. 4 (April 2015): 744–765.
Version
Author's final manuscript
Abstract
An analytical Mason equivalent circuit is derived for a circular, clamped plate piezoelectric micromachined ultrasonic transducer (pMUT) design in 31 mode, considering an arbitrary electrode configuration at any axisymmetric vibration mode. The explicit definition of lumped parameters based entirely on geometry, material properties, and defined constants enables straightforward and wide-ranging model implementation for future pMUT design and optimization. Beyond pMUTs, the acoustic impedance model is developed for universal application to any clamped, circular plate system, and operating regimes including relevant simplifications are identified via the wave number-radius product ka. For the single-electrode fundamental vibration mode case, sol-gel Pb(Zr[subscript 0.52])Ti[subscript 0.48]O[subscript 3] (PZT) pMUT cells are microfabricated with varying electrode size to confirm the derived circuit model with electrical impedance measurements. For the first time, experimental and finite element simulation results are successfully applied to validate extensive electrical, mechanical, and acoustic analytical modeling of a pMUT cell for wide-ranging applications including medical ultrasound, nondestructive testing, and range finding.
MIT Department
Massachusetts Institute of Technology. Department of Mechanical Engineering
Terms of Use
Creative Commons Attribution-Noncommercial-Share Alike
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DOI of Published Version
https://doi.org/10.1109/TUFFC.2014.006725
