A Flexible Underwater Pressure Sensor Array Using a Conductive Elastomer Strain Gauge
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MITSG_12-11.pdf
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Accepted version
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1.43 MB
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Author(s) • •
Yaul, Frank M
Bulovic, Vladimir
Lang, Jeffrey H
Date Issued
2012
Journal
Journal of Microelectromechanical Systems
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Version
Author's final manuscript
Abstract
This paper presents a flexible pressure sensor array which is demonstrated to transduce underwater pressure variations produced by moving objects and surface waves. The sensors exhibit a 0.0014 fractional resistance change per 100 Pa, achieving a high 1.5-Pa pressure resolution. The measurement has a repeatability of 22% of the peak amplitude of the pressure waveform, due to creep. Additionally, sensor operation while bent to a 0.5-m radius of curvature is demonstrated. Each sensor consists of a strain-concentrating polydimethylsiloxane (PDMS) diaphragm and a resistive strain gauge made of a conductive carbon-black-PDMS composite. A 1-D array of four sensors with a 15-mm center-to-center spacing is fabricated, and the dynamic response of the sensors is characterized and modeled. [2011-0333] © 2012 IEEE.
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
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DOI of Published Version
https://doi.org/10.1109/JMEMS.2012.2190714