Development of calibration standards for accurate measurement of geometry in microelectromechanical systems
Name
40265284-MIT.pdf
Description
Full printable version
Size
3.5 MB
Format
Adobe PDF
Checksum (MD5)
051fb2728639d594d7a82d526e4f7426
Author(s)
Deutsch, Erik R. (Erik Robertson), 1974-
Advisor(s)
Stephen D. Senturia.
Date Issued
1998
Publisher
Massachusetts Institute of Technology
Description
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1998.
Includes bibliographical references (leaves 45-46).
Subjects
Electrical Engineering and Computer Science
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
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