Electrochemical and photoelectrochemical micromachining of silicon in HF electroytes

Mlcak, Richard

Electrochemical and photoelectrochemical micromachining of silicon in HF electroytes

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32142133-MIT.pdf

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Author(s)

Mlcak, Richard

Advisor(s)

Harry L. Tuller.

Date Issued

1994

Publisher

Massachusetts Institute of Technology

Description

Thesis (Sc. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1994.

Includes bibliographical references (p. 219-228).

Subjects

Materials Science and Engineering

MIT Department

Massachusetts Institute of Technology. Department of Materials Science and Engineering

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