Direct Fabrication of Planar Grating by Ultrafast Laser Beam
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IMST006.pdf
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Author(s)
Venkatakrishnan, K.
Hee, C.W.
Sivakumar, N.R.
Ngoi, Kok Ann Bryan
Date Issued
January 2002
Series/Report no.
Innovation in Manufacturing Systems and Technology (IMST);
Abstract
Femtosecond laser pulse has been used for the machining of the gratings primarily due to its superior advantages over conventional continuous wave (CW) and long pulse lasers for micromachining. In this paper, we develop a novel technique for the fabrication of planar gratings by colliding two beams to generate interference fringes. This technique is simple, fast and low cost. We have successfully fabricated planar gratings on a copper substrate.
Subjects
femtosecond laser pulse
micromachining
planar grating fabrication
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